Campbell, S. A.
Fabrication Engineering at the micro-and nanoscale. 4th. edn. - New York Oxford University Press 2013 - xiv, 671p. - The oxford series in Electrical ad computer Engineering .
978-0-19-986122-4
Fabrication Engineering at the micro-and nanoscale. 4th. edn. - New York Oxford University Press 2013 - xiv, 671p. - The oxford series in Electrical ad computer Engineering .
978-0-19-986122-4