Gao, W
Precision nanometrology: Sensors and measuring systems for nanomanufacturing - New York Springer 2010 - xiii, 354p. - Springer Series in Advanced Manufacturing .
978-1-849-96253-7
Precision nanometrology: Sensors and measuring systems for nanomanufacturing - New York Springer 2010 - xiii, 354p. - Springer Series in Advanced Manufacturing .
978-1-849-96253-7