Cold plasma in materials fabrication : (Record no. 42141)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03754nam a2200841 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 5271223 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | IEEE |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20191218152118.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr |n||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 100317t20151994njua ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780470544273 |
| Qualifying information | electronic |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9780780347144 |
| Qualifying information | |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 0470544279 |
| Qualifying information | electronic |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1109/9780470544273 |
| Source of number or code | doi |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (CaBNVSL)mat05271223 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (IDAMS)0b000064810cc99a |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | CaBNVSL |
| Language of cataloging | eng |
| Description conventions | rda |
| Transcribing agency | CaBNVSL |
| Modifying agency | CaBNVSL |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA2020 |
| Item number | .G75 1994eb |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.044 |
| Edition number | 22 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Grill, Alfred, |
| Relator term | author. |
| 245 10 - TITLE STATEMENT | |
| Title | Cold plasma in materials fabrication : |
| Remainder of title | from fundamentals to applications / |
| Statement of responsibility, etc. | Alfred Grill. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | Piscataway, New Jersey : |
| Name of producer, publisher, distributor, manufacturer | IEEE Press, |
| Date of production, publication, distribution, manufacture, or copyright notice | c1994. |
| 264 #2 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | [Piscataqay, New Jersey] : |
| Name of producer, publisher, distributor, manufacturer | IEEE Xplore, |
| Date of production, publication, distribution, manufacture, or copyright notice | [1994] |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 PDF (xiii, 257 pages) : |
| Other physical details | illustrations. |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | electronic |
| Source | isbdmedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | online resource |
| Source | rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching. |
| 506 1# - RESTRICTIONS ON ACCESS NOTE | |
| Terms governing access | Restricted to subscribers or individual electronic text purchasers. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs. |
| 530 ## - ADDITIONAL PHYSICAL FORM AVAILABLE NOTE | |
| Additional physical form available note | Also available in print. |
| 538 ## - SYSTEM DETAILS NOTE | |
| System details note | Mode of access: World Wide Web |
| 588 ## - SOURCE OF DESCRIPTION NOTE | |
| Source of description note | Description based on PDF viewed 12/21/2015. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Low temperature plasmas. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Manufacturing processes. |
| 655 #0 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| 695 ## - | |
| -- | Adhesives |
| 695 ## - | |
| -- | Atomic measurements |
| 695 ## - | |
| -- | Biographies |
| 695 ## - | |
| -- | Cathodes |
| 695 ## - | |
| -- | Chemical vapor deposition |
| 695 ## - | |
| -- | Chemicals |
| 695 ## - | |
| -- | Discharges |
| 695 ## - | |
| -- | Electric fields |
| 695 ## - | |
| -- | Electrodes |
| 695 ## - | |
| -- | Etching |
| 695 ## - | |
| -- | Gases |
| 695 ## - | |
| -- | Glow discharges |
| 695 ## - | |
| -- | Indexes |
| 695 ## - | |
| -- | Inductors |
| 695 ## - | |
| -- | Ionization |
| 695 ## - | |
| -- | Ions |
| 695 ## - | |
| -- | Nitrogen |
| 695 ## - | |
| -- | Plasma chemistry |
| 695 ## - | |
| -- | Plasma diagnostics |
| 695 ## - | |
| -- | Plasma temperature |
| 695 ## - | |
| -- | Plasmas |
| 695 ## - | |
| -- | Plastics |
| 695 ## - | |
| -- | Polymer films |
| 695 ## - | |
| -- | Polymers |
| 695 ## - | |
| -- | Radio frequency |
| 695 ## - | |
| -- | Spectroscopy |
| 695 ## - | |
| -- | Substrates |
| 695 ## - | |
| -- | Surface cleaning |
| 695 ## - | |
| -- | Surface treatment |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | John Wiley & Sons, |
| Relator term | publisher. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | IEEE Xplore (Online service), |
| Relator term | distributor. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Relationship information | Print version: |
| International Standard Book Number | 9780780347144 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Abstract with links to resource |
| Uniform Resource Identifier | https://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223 |
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