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Plasma Processes for Semiconductor Fabrication

By: Hitchon, W. N. G.

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BookSeries: Cambridge Studies in Semiconductor Phusics and Microelectron.Publisher: Cambridge Cambridge University press 1999Description: ix, 221p.ISBN: 0-521-59175-9.

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Item type	Current location	Call number	Status	Date due	Barcode
		621.38152 HIT (Browse shelf)	Available		508308

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