Lee, Ki Bang, <br/><br/>
Principles of microelectromechanical systems / 
 Principles of MEMS 
Ki Bang Lee. 
 - 1 PDF (xii, 667 pages). 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors. 
<br/><br/> Restricted to subscribers or individual electronic text purchasers. 
<br/><br/>
<br/><br/><br/>Mode of access: World Wide Web 
<br/><br/><label>ISBN: </label>9780470649671 
<br/><br/><label>Standard No.: </label>10.1002/9780470649671  doi 
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .P75 2011eb 
<br/><br/><label>Dewey Class. No.: </label>621.381