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Micromechanics and MEMS : classic and seminal papers to 1990 / edited by William S. Trimmer.

by Trimmer, W | John Wiley & Sons [publisher.] | Institute of Electrical and Electronics Engineers | IEEE Xplore (Online service) [distributor.].

Material type: book Book; Format: available online remote Publisher: New York : IEEE Press, 1997Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [1997]Online access: Abstract with links to resource Availability: No items available

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Principles of microelectromechanical systems / Ki Bang Lee.

by Lee, Ki Bang [author.] | Lee, Ki Bang | IEEE Xplore (Online Service) [distributor.] | John Wiley & Sons [publisher.].

Material type: book Book; Format: available online remote Publisher: Hoboken, New Jersey : WILEY/IEEE Press, c2011Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2010]Other title: Principles of MEMS.Online access: Abstract with links to resource Availability: No items available

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