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Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

by May, Gary S [author.] | Spanos, Costas J | John Wiley & Sons [publisher.] | IEEE Xplore (Online service) [distributor.].

Material type: book Book; Format: available online remote Publisher: [Piscataway, New Jersey] : IEEE, c2006Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2006]Online access: Abstract with links to resource Availability: No items available

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Process identification and PID control / Su Whan Sung, Jietae Lee, In-Beum Lee.

by Sung, Su Whan [author.] | Lee, Jietae | Lee, In-Beum, 1955- | John Wiley & Sons [publisher.] | IEEE Xplore (Online service) [distributor.].

Material type: book Book; Format: available online remote Publisher: Singapore ; John Wiley, c2009Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2009]Other title: Process identification and proportional-integral-derivative control.Online access: Abstract with links to resource Availability: No items available

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