| 000 | 00331nam a2200109Ia 4500 | ||
|---|---|---|---|
| 008 | 160523s9999 xx 000 0 und d | ||
| 020 | _a978-0-471-41452-0 | ||
| 100 | _aWelker, R. W. | ||
| 245 | _aContamination and ESD control in high-technology manufacturing | ||
| 260 |
_aNew Jersey _bWiley Interscience _c2006 |
||
| 300 | _axvi, 498p. | ||
| 999 |
_c30089 _d30089 |
||