000 00433nam a2200121Ia 4500
008 160523s9999 xx 000 0 und d
020 _a978-0-89838-210-5
100 _aEl-kareh, B.
245 _aIntroduction To VLSI Silicon devices: Physics, Technology and Characterization
260 _aNorwell, USA
_bKluwer Academic Publishers
_c1986
300 _axvii, 569p.
490 _aThe Kluwer International series in Engineering and Computer
999 _c31076
_d31076