000 00349nam a2200109Ia 4500
008 160523s9999 xx 000 0 und d
020 _a978-0-521-82172-8
100 _aGrigoropoulos, C. P.
245 _aTransport in laser microfabrication: Fundamentals and applications
260 _aCambridge
_bCambridge University Press
_c2009
300 _axii, 400p.
999 _c33092
_d33092