| 000 | 00385nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 160523s9999 xx 000 0 und d | ||
| 020 | _a978-1-849-96253-7 | ||
| 100 | _aGao, W | ||
| 245 | _aPrecision nanometrology: Sensors and measuring systems for nanomanufacturing | ||
| 260 |
_aNew York _bSpringer _c2010 |
||
| 300 | _axiii, 354p. | ||
| 490 | _aSpringer Series in Advanced Manufacturing | ||
| 999 |
_c35589 _d35589 |
||