000			00301nam a2200109Ia 4500
008			160523s9999 xx 000 0 und d
020			_a978-1-441-96019-1
100			_aYounis, M. I
245			_aMEMS linear and nonlinear statics and dynamics
260			_aNew York _bSpringer _c2011
300			_axv, 453p.
999			_c35611 _d35611