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Lee, Ki Bang,

Principles of microelectromechanical systems / Principles of MEMS Ki Bang Lee. - 1 PDF (xii, 667 pages).

Includes bibliographical references and index.

Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors.

Restricted to subscribers or individual electronic text purchasers.

Mode of access: World Wide Web

ISBN: 9780470649671

Standard No.: 10.1002/9780470649671 doi

LCCN:

Subjects--Topical Terms:
Microelectromechanical systems.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7875 / .P75 2011eb

Dewey Class. No.: 621.381

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