Principles of microelectromechanical systems / (Record no. 42263)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03143nam a2200985 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 5628438 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | IEEE |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20191218152120.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr |n||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 151221s2010 nju ob 001 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| Canceled/invalid LC control number | 2010007955 (print) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780470649671 |
| Qualifying information | ebook |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9780470466346 |
| Qualifying information | cloth |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 0470466340 |
| Qualifying information | cloth |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 0470649674 |
| Qualifying information | electronic |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1002/9780470649671 |
| Source of number or code | doi |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (CaBNVSL)mat05628438 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (IDAMS)0b0000648138cdb9 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | CaBNVSL |
| Language of cataloging | eng |
| Description conventions | rda |
| Transcribing agency | CaBNVSL |
| Modifying agency | CaBNVSL |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7875 |
| Item number | .P75 2011eb |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Edition number | 22 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Lee, Ki Bang, |
| Relator term | author. |
| 245 10 - TITLE STATEMENT | |
| Title | Principles of microelectromechanical systems / |
| Statement of responsibility, etc. | Ki Bang Lee. |
| 246 3# - VARYING FORM OF TITLE | |
| Title proper/short title | Principles of MEMS |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | Hoboken, New Jersey : |
| Name of producer, publisher, distributor, manufacturer | WILEY/IEEE Press, |
| Date of production, publication, distribution, manufacture, or copyright notice | c2011. |
| 264 #2 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | [Piscataqay, New Jersey] : |
| Name of producer, publisher, distributor, manufacturer | IEEE Xplore, |
| Date of production, publication, distribution, manufacture, or copyright notice | [2010] |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 PDF (xii, 667 pages). |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | electronic |
| Source | isbdmedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | online resource |
| Source | rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors. |
| 506 1# - RESTRICTIONS ON ACCESS NOTE | |
| Terms governing access | Restricted to subscribers or individual electronic text purchasers. |
| 530 ## - ADDITIONAL PHYSICAL FORM AVAILABLE NOTE | |
| Additional physical form available note | Also available in print. |
| 538 ## - SYSTEM DETAILS NOTE | |
| System details note | Mode of access: World Wide Web |
| 588 ## - SOURCE OF DESCRIPTION NOTE | |
| Source of description note | Description based on PDF viewed 12/21/2015. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectromechanical systems. |
| 655 #0 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| 695 ## - | |
| -- | Actuators |
| 695 ## - | |
| -- | Bibliographies |
| 695 ## - | |
| -- | Bridge circuits |
| 695 ## - | |
| -- | Capacitance |
| 695 ## - | |
| -- | Capacitors |
| 695 ## - | |
| -- | Closed-form solution |
| 695 ## - | |
| -- | Damping |
| 695 ## - | |
| -- | Electromagnetics |
| 695 ## - | |
| -- | Electrostatic actuators |
| 695 ## - | |
| -- | Electrostatics |
| 695 ## - | |
| -- | Equations |
| 695 ## - | |
| -- | Fabrication |
| 695 ## - | |
| -- | Face |
| 695 ## - | |
| -- | Fluid dynamics |
| 695 ## - | |
| -- | Force |
| 695 ## - | |
| -- | Friction |
| 695 ## - | |
| -- | Gravity |
| 695 ## - | |
| -- | Heating |
| 695 ## - | |
| -- | Indexes |
| 695 ## - | |
| -- | Inductors |
| 695 ## - | |
| -- | Magnetic cores |
| 695 ## - | |
| -- | Manganese |
| 695 ## - | |
| -- | Materials |
| 695 ## - | |
| -- | Mathematical model |
| 695 ## - | |
| -- | Mechanical sensors |
| 695 ## - | |
| -- | Microelectromechanical systems |
| 695 ## - | |
| -- | Microelectronics |
| 695 ## - | |
| -- | Micromachining |
| 695 ## - | |
| -- | Micromechanical devices |
| 695 ## - | |
| -- | Microstructure |
| 695 ## - | |
| -- | Oscillators |
| 695 ## - | |
| -- | Petroleum |
| 695 ## - | |
| -- | Resistors |
| 695 ## - | |
| -- | Sensors |
| 695 ## - | |
| -- | Silicon |
| 695 ## - | |
| -- | Springs |
| 695 ## - | |
| -- | Strain |
| 695 ## - | |
| -- | Stress |
| 695 ## - | |
| -- | Structural beams |
| 695 ## - | |
| -- | Substrates |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lee, Ki Bang. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | IEEE Xplore (Online Service), |
| Relator term | distributor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | John Wiley & Sons, |
| Relator term | publisher. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Relationship information | Print version: |
| International Standard Book Number | 9780470466346 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Abstract with links to resource |
| Uniform Resource Identifier | https://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438 |
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