		Plasma Processes for Semiconductor Fabrication by Hitchon, W. N. G. Material type: Book; Format: print ; Literary form: not fiction Publisher: Cambridge Cambridge University press 1999Availability: Items available for loan: [Call number: 621.38152 HIT] (1). Add to cart (remove)
		Photoinduced Defects in Semiconductors by Redfield, D. Material type: Book; Format: print ; Literary form: not fiction Publisher: Cambridge Cambridge University Press 1996Availability: Items available for loan: [Call number: 621.38152 RED] (1). Add to cart (remove)

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